COSMA Process control software

The simplest, most efficient software to develop processes, operate, and maintain CORIAL systems

COSMA process control software in brief

CORIAL’s COSMA, Advanced Process Control Software offers a seamless, efficient interface for process development, operating, and performing the maintenance routines on all CORIAL systems.

COSMA software features a Graphical Web User Interface running with various Internet browsers and operating systems as Windows, Linux, etc.).

Key benefits

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SIMPLE-TO-USE GRAPHICAL USER INTERFACE (GUI)

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COMMON CONTROL INTERFACE ACROSS RIE, ICP-RIE, DRIE, ICP-CVD AND PECVD PRODUCTS

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SAFE, SECURE OPERATION AND MAINTENANCE

Key features

COSMA process control software - Process edition

Process editing

Quickly create, optimize and customize new process recipes.

Edit, store, use, and duplicate process recipes with COSMA’s unique user interface.

Process adjustment

Use CORIAL’s exclusive interactive process control and editing capability to quickly optimize and fine tune your recipes.

Perform diverse actions while simultaneously running processes; e.g., modify any process parameter, toggle ICP power (On / Off), or transition to a different process step.

COSMA process control software - Process development
COSMA - Process operation

Process operation

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Multiple user access rights

Password-controlled login with different levels of user access.

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Multistep management

Automatic transition to the next process step, based on signals from endpoint detectors or process timers.

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Real-time process data display

All process parameters, real or virtual (mathematical combination of real process parameters) can be monitored simultaneously in real time during process execution.

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Process reproducibility

Each process step is tightly controlled and monitored, to ensure reproducibility and optimum performance.

Process analysis

Continuous system data logging (200 ms) to thoroughly analyze all process parameters and perform fine tuning.

COSMA process control software - reprocessing
COSMA process control software - EPD by laser interferometry

End Point Detection

Reliable and automated End Point Detection (EPD) system results in tighter process control and precise rate determination.

CORIAL EPD utilizes an optional CCD camera and laser interferometry.

Any process parameter can be used for EPD (such as self-bias, RF tuning, throttle valve position, etc.).

System maintenance

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Safe system maintenance

Secured maintenance operation is ensured with CORIAL’s pre-defined maintenance routines.

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Remote access

Remote maintenance via the Internet is available to perform software updates, on-line diagnostics, and process support.

COSMA process control software - remote access
COSMA Process control software - Upgrades

Upgrades

Manage software upgrades through a simple and easy-to-use installation web interface.