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MARKETS
Microelectromechanical Systems (MEMS)
Failure Analysis
Optoelectronics
Compound Semiconductor Power Devices
Advanced Packaging
Wireless Communication
Photomask
Integrated Optics
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TECHNOLOGIES
Plasma etch
RIE
ICP-RIE
DRIE
Plasma enhanced deposition
ICP-CVD
PECVD
Atomic layer processing
ALE
ALD
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PRODUCTS
hardware
CORIAL 200 SERIES
Systems for R&D and Small Production
Corial 200FA RIE
Corial 200S RIE
Corial 200R RIE
Corial 210RL RIE
Corial 200I ICP-RIE
Corial 210IL ICP-RIE
Corial 210D ICP-CVD
Corial D250 PECVD
Corial D250L PECVD
CORIAL 300 SERIES
Systems for 24/7 production environment
Corial 300S RIE
Corial 360RL RIE
Corial 360IL ICP-RIE
Corial D350 PECVD
Corial D350L PECVD
CORIAL 500 SERIES
Very large area batch system
CORIAL D500
CORIAL PS SERIES
Modular cluster based platform
Corial PS200, 200 mm platform
Software
COSMA
Process control software
COSMA Pulse
Control software for time multiplexed processes
COSMA RS
Reprocessing Software
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