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Microelectromechanical Systems (MEMS)
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hardware
CORIAL 200 SERIES
Systems for R&D and Small Production
Corial 200FA RIE
Corial 200S RIE
Corial 200R RIE
Corial 210RL RIE
Corial 200I ICP-RIE
Corial 210IL ICP-RIE
Corial 210D ICP-CVD
Corial D250 PECVD
Corial D250L PECVD
CORIAL 300 SERIES
Systems for 24/7 production environment
Corial 300S RIE
Corial 360RL RIE
Corial 360IL ICP-RIE
Corial D350 PECVD
Corial D350L PECVD
CORIAL 500 SERIES
Very large area batch system
CORIAL D500
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COSMA
Process control software
COSMA Pulse
Control software for time multiplexed processes
COSMA RS
Reprocessing Software
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Feb 23, 2017
CORIAL, intuitive products, capable processes, world-class...
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Latest News
Join CORIAL at “Leti Innovation Days 2019” the week of June 24th in Grenoble
3DInCites: Seen on the Scene at SEMICON Europa 2018
Plasma-Therm holds Grand Opening Celebration for Grenoble, France Facility
Plasma-Therm completes acquisition of CORIAL
Rejoignez-nous à Nanotech France 2018
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