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CORIAL 200 SERIES
Systems for R&D and Small Production
Corial 200FA RIE
Corial 200S RIE
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Corial 210RL RIE
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Corial D250 PECVD
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CORIAL 300 SERIES
Systems for 24/7 production environment
Corial 300S RIE
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Corial 360IL ICP-RIE
Corial D350 PECVD
Corial D350L PECVD
CORIAL 500 SERIES
Very large area batch system
CORIAL D500
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Feb 23, 2017
CORIAL, intuitive products, capable processes, world-class...
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Visit CORIAL at SEMICON Europa 2019
Visit CORIAL at SEMICON Taiwan 2019 in the Silicon Europe booth
Join CORIAL at “Leti Innovation Days 2019” the week of June 24th in Grenoble
3DInCites: Seen on the Scene at SEMICON Europa 2018
Plasma-Therm holds Grand Opening Celebration for Grenoble, France Facility
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